■論文No. |
MSS24027,CHS24009,BMS24005 |
■ページ数 |
3ページ |
■発行日
|
2024/03/25 |
■タイトル |
Sensory evaluation of MEMS tactile display device with 7x7 SMA thick film actuator array |
■タイトル(英語) |
Sensory evaluation of MEMS tactile display device with 7x7 SMA thick film actuator array |
■著者名 |
Mineta Takashi(Yamagata University),Amano Haruto(Yamagata University),Tagami Tatsuya(Yamagata University),Saito Ryo(Yamagata University) |
■著者名(英語) |
Takashi Mineta(Yamagata University),Haruto Amano(Yamagata University),Tatsuya Tagami(Yamagata University),Ryo Saito(Yamagata University) |
■価格 |
会員 ¥220 一般 ¥330 |
■書籍種類 |
研究会(論文単位) |
■グループ名 |
【E】センサ・マイクロマシン部門 マイクロマシン・センサシステム/【E】センサ・マイクロマシン部門 ケミカルセンサ/【E】センサ・マイクロマシン部門 バイオ・マイクロシステム合同研究会 |
■本誌 |
2024年3月28日-2024年3月30日マイクロマシン・センサシステム/ケミカルセンサ/バイオ・マイクロシステム合同研究会
|
■本誌掲載ページ |
13-15ページ |
■原稿種別 |
英語 |
■電子版へのリンク |
|
■キーワード |
Tactile display|Shape memory alloy|actuator array|MEMS| Sensory evaluation|Tactile display|Shape memory alloy|actuator array|MEMS| Sensory evaluation |
■要約(日本語) |
A MEMS tatile display device with arrayed 7×7 SMA thick film actuators (1.5 mm pitch) and SU-8 lithographed mico-pin/cap structures was fabricated to validate the tactile presentaion on a finger skin performance. Sensrory evluation was conduced using completed tactile display device. All subjects was able to clearly detect the tactile stimuli at vibration frequency of 10-20 Hz even though only one pin was driven. When the location of the vibrating pins were moved in the device surface, the moving direction was easily detected. |
■要約(英語) |
A MEMS tatile display device with arrayed 7×7 SMA thick film actuators (1.5 mm pitch) and SU-8 lithographed mico-pin/cap structures was fabricated to validate the tactile presentaion on a finger skin performance. Sensrory evluation was conduced using completed tactile display device. All subjects was able to clearly detect the tactile stimuli at vibration frequency of 10-20 Hz even though only one pin was driven. When the location of the vibrating pins were moved in the device surface, the moving direction was easily detected. |
■版 型 |
A4 |
■PDFファイルサイズ |
1,191Kバイト |